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UM E-Theses Collection (澳門大學電子學位論文庫)
- Title
-
Design and implementation of compact micro-/nano-positioning stage driven by piezoelectric actuator
- Issue date
-
2018.
- Author
-
Wu, Ze Yi
- Faculty
-
Faculty of Science and Technology
- Department
-
Department of Electromechanical Engineering
- Degree
-
M.Sc.
- Subject
-
Piezoelectric devices
Microtechnology
Nanotechnology
- Supervisor
-
Xu, Qing Song
- Files In This Item
- Location
- 1/F Zone C
- Library URL
- 991006693619706306
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