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UM E-Theses Collection (澳門大學電子學位論文庫)

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Title

Design and fabrication of MEMS microheater and its application in gas sensing

Issue date

2022.

Author

Chen, Yu Long

Faculty
Institute of Applied Physics and Materials Engineering
Degree

Ph.D.

Subject

Microelectronics

Gas detectors -- Design and construction

Supervisor

Ng, Kar Wei

Cheng, Xing

Files In This Item

Full-text (Intranet only)

Location
1/F Zone C
Library URL
991010186279806306